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Surface acoustic wave sensor : ウィキペディア英語版 | Surface acoustic wave sensor Surface acoustic wave sensors are a class of microelectromechanical systems (MEMS) which rely on the modulation of surface acoustic waves to sense a physical phenomenon. The sensor transduces an input electrical signal into a mechanical wave which, unlike an electrical signal, can be easily influenced by physical phenomena. The device then transduces this wave back into an electrical signal. Changes in amplitude, phase, frequency, or time-delay between the input and output electrical signals can be used to measure the presence of the desired phenomenon. ==Device Layout==
The basic surface acoustic wave device consists of a piezoelectric substrate, an input interdigitated transducer (IDT) on one side of the surface of the substrate, and a second, output interdigitated transducer on the other side of the substrate. The space between the IDTs, across which the surface acoustic wave will propagate, is known as the delay-line. This region is called the delay line because the signal, which is a mechanical wave at this point, moves much slower than its electromagnetic form, thus causing an appreciable delay.
抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)』 ■ウィキペディアで「Surface acoustic wave sensor」の詳細全文を読む
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